MicroNano Research Facility

One of Australia’s leading micro- and nano-fabrication research centres


Dr. Dru Morrish

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Post author: Dru Morrish. Last update: 30/10/2015 at 2:55 pm by Dru Morrish.


This state-of-the-art facility within RMIT University’s Melbourne city campus will support over 70 researchers and research students within the School of Electrical and Computer Engineering and a large number of collaborating researchers within and external to RMIT University.

The MNRF will house facilities for the realisation of micro- and nano-devices for fundamental and applied research in biotechnology, electronics, electromagnetics, fluidics, materials science, photonics, and sensing.

The facilities will include a full suite of photolithography equipment, wet processing facilities, dry etch capabilities, polymer processing laboratories, thin film deposition and patterning equipment, micro- and nano-metrology capabilities, and support facilities for design and packaging.

The MNRF will host

  • the Victorian research and infrastructure node of the Australian Research Council Centre of Excellence for Ultrahigh bandwidth Devices for Optical Systems (CUDOS, CUDOS@RMIT) and
  • the internationally-leading MicroNano Research Laboratory



The Microelectronic and Materials Technology Centre (MMTC) at RMIT University is one of Australia’s leading research centres specialising in micro- and nano-fabrication technologies. It has comprehensive facilities for the design and modelling, fabrication, packaging, and characterisation of micro- and nano-scale devices; enabling researchers to transform ideas into accessible technology.

At nearly 30 years of age, the Microelectronics and Materials Technology Centre is due to soon retire with the establishment of the MicroNano Research Facility, the MNRF. This evolution represents the increasing contribution of nanotechnology and nanomaterials to our research, and the marriage of micro- and nano- in all our research.

The MNRF will be an ~1000 m2 facility located at RMIT University’s Melbourne city campus. The facility infrastructure at a cost of ~$30 million will comprise 300 m2 of Class 100 cleanrooms, 250 m2 of Class 10,000 cleanrooms, a large physical containment Level 2 (PC2) laboratory, a sensor technology laboratory, and support laboratory.


The MNRF will be a node of the Melbourne Centre for Nanofabrication (MCN) and accessible through the Australian National Fabrication Facility (ANFF), offering complementary facilities and expertise to the national capability. User access policies and cost schedules similar to those within the MCN network will be implemented.

Program participation: ARIN
Access by fee for service
Access by users external to managing organisation, Access by users internal to managing organisation


Dr. Dru Morrish

Dr. Dru Morrish

Facility Manager at RMIT University, .

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MicroNano Research Facility

RMIT University, Melbourne Campus. Bowen Street, Melbourne, Victoria, Australia.

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Type: Core facility in a research organisation
Discipline areas: Biological Science, Materials Science, Nano Science
Precinct: Central
Affiliations: RMIT University

Biological Science categories: Clean rooms, Design and Prototyping, Devices, Lab-on-chip, Microfluidic, Nanofabrication, Production

Tags: nanofabrication