Microbeam Laboratory – CSIRO

Advanced Microanalysis Facility specialising in electron beam microanalysis and imaging


Mr. Colin MacRae

61 3 95458800

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Post author: Colin Macrae. Last update: 02/11/2015 at 1:44 pm by Colin Macrae.


The Microbeam Laboratory specialises in microscopy and microanalysis using electron beam based techniques.  The facility is staffed by a highly skilled group of experts and is supported by a well equipped sample preparation facility. The Microbeam Laboratory has over 50 years of experience in microanalysis and mapping to solve industrial and research problems. We are experts in elemental trace microanalysis on materials/minerals which are ultra-fine (>5 micron). Through the application of hyperspectral mapping and data analysis we are able to deliver phase patched maps differentiating both chemical and structural issues together with full quantitative microanalysis. The group has been at the forefront of advances in data analysis solutions for EPMA, SEM and Cathodoluminescence microscopy.



Trace Element Microanalysis, Elemental mapping and data analysis, Rare phase location and analysis, ARPANSA certified laboratory to handle NORM materials with extensive expertise in analysis of uranium bearing minerals.


FEI Quanta-400F FEG-ESEM with Bruker SDD X-ray detector, Bruker Electron Backscatter Detector (EBSD), Hot stage (1000°C) and Peltier Stage

High resolution Environmental SEM capable of imaging, X-ray mapping, and Electron Diffraction mapping, used for Quantitative microanalysis, Hyperspectral Mapping, Electron Diffraction mapping, Imaging wet and hydrated samples.

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Hitachi S5000 – In Lens Field Emission SEM with Oxford EDS and Fast BSE

Ultra-high resolution FEG-SEM (0.6nm resolution) used for Ultra high resolution and microanalysis.

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JEOL 8500F (CL) Electron Probe Microanalyser with 5 Wavelength Dispersive Spectrometers, 2 Energy Dispersive Spectrometers and Cathodoluminescence Spectrometry

Field Emission (FEG) Electron Microprobe microanalyser (EPMA) for quantitative trace analysis (Be-U), high resolution imaging and chemical and structural mapping used for Trace element analysis, Mapping, trace speciation.

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JEOL 8900R Electron Probe microanalyser with 5 WDS and JEOL EDS

Electron microprobe microanalyser (EPMA) with high precision optical encoded stage used for Trace element microanalysis and mapping of large areas, rare phase location and quantification.

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Laser Beam Induced Current Microscope

Scanning Laser Microscope for mapping photocurrents used for mapping photocurrents in semiconducting materials.

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Nuclear Microprobe

PIXE elemental mapping used for quantitative trace element mapping.

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This facility has multiple nodes

Microbeam Laboratory – CSIRO at Nuclear Microprobe Facility

CSIRO. School of Physics, University of Melbourne,, Swanston Street, Parkville, Victoria, Australia.
Node manager: Mr. Colin MacRae. P: 61 3 95458800. E: colin.macrae@csiro.au.
Nuclear Microprobe based at the University of Melbourne specialises in quantitative PIXE imaging and analysis. PIXE analysis utilises GeoPIXE software to provide a real-time X-ray Fluorescence Spectral deconvolution enabling multiple elemental layers to be extracted as the map is accumulated.

Microbeam Laboratory – CSIRO at CSIRO Nuclear Microprobe

CSIRO, . Basement, School of Physics, University of Melbourne, Parkville, Victoria, Australia.
Node manager: Dr. Jamie Laird. P: 613 8344 8375. E: Jamie.Laird@csiro.au.
CSIRO Nuclear Microprobe (NMP) routinely performs PIXE elemental analysis of mineral assemblages with trace element sensitivities down to ppm levels. Areas scanned range from 20×20 um



Type: Core facility in a research organisation
Discipline areas:
Precinct: South east
Affiliations: CSIRO

Tags: electron microscopy, EPMA, FEG-SEM, ion beam analysis, Microanalysis, SEM