Melbourne Centre for Nanofabrication

Open access to Australia’s largest micro-nano fabrication cleanroom


Dr. Paul Spizzirri

You need to login or register to bookmark/favorite this content.

Post author: MCN. Last update: 02/11/2015 at 1:21 pm by MCN.


The Melbourne Centre for Nanofabrication (MCN) provides open-access to cutting-edge fabrication instrumentation in a world-class facility in Clayton. We aim to facilitate the integration of micro-nano fabrication techniques and processes into the research and development activities of Australian researchers and innovators.

The importance of micro-nano fabrication has been recognised nationally through the establishment of the Australian National Fabrication Facility (ANFF), which is funded through the National Collaborative Research Infrastructure Scheme (NCRIS). MCN is the central facility of the ANFF Victorian Node.

MCN boasts Australia’s largest research cleanroom, housing class 100 – 10,000 cleanroom facilities, as well as complimentary biological and microscopy laboratory environments. Our emphasis is the chemical and biological manipulation of nanostructures and the design, rapid-prototyping and fabrication of nano-devices. Our outputs are primarily in the fields of solar energy, biosensing, micro-nano fluidic devices, drug delivery, micro-mechanical systems, optics and medical bionics.

MCN provides world-class facilities and in-house expertise to users from universities, research organisations and industry clients from across Australia. We bring together the expertise of six Victorian universities and CSIRO and aim to maximise interdisciplinary and inter-institutional collaboration and minimise duplication through being a strong, specialist fabrication centre. MCN is also open to users on an international basis.



Features of this facility are:

  • A fully equipped electronic and hard materials device fabrication cleanroom with a range of state-of-the-art instruments.
  • A biological laboratory containing full range of equipment and specialist staff
  • A Confocal, Atomic Force and Scanning Electron Microscope suite
  • In-house technical support and service provision
  • Self service access after completion of training
  • Cleanroom and Biological laboratory space to hire – short or long term
  • Hot desk accommodation

Capabilities of this facility are:

Design and additive manufacturing

  • 3D object design and prototyping
  • Photomask design
  • Computer modelling/programming
  • Computer numerical control (CNC) subtractive milling


  • Electron beam lithography
  • Nano imprint lithography
  • Hot embossing
  • UV mask writing
  • Optical lithography

Thin film deposition

  • Sputtering
  • Thermal/electron beam evaporation
  • Plasma enhanced chemical vapour deposition
  • Diamond chemical vapour deposition
  • Atomic layer deposition
  • Electroplating


  • Reactive ion etching
  • Deep reactive ion etching
  • Wet chemical etching


  • Dual beam – focused ion beam / scanning electron microscopy
  • Environmental scanning electron microscopy
  • Atomic Force Microscopy
  • Confocal microscopy with integrated biological Atomic Force Microscopy
  • Zeta potential and particle sizing
  • Nanoarray printing
  • Spectroscopic ellipsometry

Dedicated staff are on hand to either provide services to clients or train users and where appropriate, provide technical support. Access is available at a low cost to academic users and at a commercial rate for industry users. For more information on pricing, please visit the MCN’s Access and Pricing Policy. 

To gain access to MCN, start by contacting one of our instrument managers or email with your proposed project. MCN will respond to your initial contact within two working days. Once a project has been agreed upon, you will be asked to submit a registration form and attend facility induction. Once these steps are complete you can begin training on the appropriate instruments. For more information on access, please visit the MCN website. 

Access by fee for service
Access by users external to managing organisation, Access by users internal to managing organisation


AC/DC Sputter System

Sputter system used for sputter deposition of thin films .

Facility: |

ALD Fiji F200

Atomic Layer Deposition Aparatus used for Depositing thin films of metals and metal oxides through atomic layer deposition.

Facility: |

ALD Savannah S100

Atomic Layer Deposition Apparatus used for Depositing thin films of metals and metal oxides through atomic layer deposition.

Facility: |

Bio Atomic Force Microscope

Atomic Force Microscope used for Live cell imaging; Elastic properties of the cytoskeleton and cell adhesion; Single molecule studies on DNa, RNA, proteins, dendrimers, carbohydrates, lipids etc; Binding studies such as receptor/ligand or antibody/antigene; Intramolecular interactions protein folding, binding site localization etc; Biomaterial studies, biofouling, biosensors, capsules; Soft materials studies such as degration, mechanical or electrical properties; Polymer and thin film imaging and mapping; Nanoparticles, nanotubes, nanocomposites, vesicles, colloids, quantum dots; Electrochemistry from biomolecules to metal substrates. .

Facility: |

Cary 60 UV/Vis Spectrophotometer

UV/Vis Spectrophotometer used for quantitative analysis.

Facility: |

Cleanroom (Dimension iCon) AFM

Atomic Force Microscope used for Nanoscale materials and surface characterisation, electrical materials characterisation, force and mechanical properties mapping.

Facility: |

CytoViva Hyperspectral Imaging System

A hyperspectral imaging system used for Obtaining hyperspectral images for Nanomaterials, Biomaterials, 3D Deconvolution images for Nanoparticle in Cells.

Facility: |

Delta 80 Spin Coater

Spin Coater used for Photolithography, used to coat AZ series only photoresist, avoiding material cross contamination .

Facility: |


Wet Dicing Saw used for Dicing a range of materials on automatic or semi automatic mode.

Facility: |

DualBeam FIB-SEM

This machine combines a scanning electron microscope (SEM) and a focused ion bea (FIB) with gas chemistries used for High resolution patterning and characterisation of nanostructures .

Facility: |

Dynatex Scriber Breaker

Scriber and breaker with a diamond tip used for Scribing and breaking crystalline solids.

Facility: |

Electron Beam Evaporator

Evaporator with electron beam source used for Evaporation of materials for thin film deposition .

Facility: |

EVG Mask Aligner

Mask Aligner used for Photolithography, especially for aligning multi layer features using multiple masks .

Facility: |

Gold Electroplator

Complete non cyanide gold plating system used for Electroplating of thin gold layers .

Facility: |

HiTech Furnace

Furnace used for Wet and dry silicon oxidation .

Facility: |

Hot embosser

Pattern replication used for transferring patterns from masters to polymers .

Facility: |

Intelligent Micro Patterning

UV Direct Write Photolithography used for Maskless Photolithography .

Facility: |

Laser Doppler Vibrometers

Laser Doppler Vibrometer used for Characterisation of oscillating systems and surface acoustic waves .

Facility: |

Laser Scanning Confocal System

Laser based scanning Confocal Microscope used for ADME Tox(Nanopartical Drug Delivery), Target Identification, Neurobiology, Regenerative Studies, Palaeontology, Marine Biology, Chemical Biology, Molecular Pathology, Biophysics, Cell Signaling, Developmental Biology, 3D imaging and Live cell movies.

Facility: |

Laser TIRF System

Nikon TIRF system with three lasers used for Optical imaging on cover slip surfaces thin layers up to 200nm.

Facility: |

LightField Microspectrometer

An all-new 64-bit data acquisition platform for spectroscopy and imaging. used for measuring spectrums for nanoparticles, cells and other materials.

Facility: |


Nano array spotter used for Diagnostic microarray manufacturing. .

Facility: |

Nickel Electroplator

General nickel electroplating system used for Fabricating nickel shims and electroforms to approximately 8 inches diameter.

Facility: |

Objet 3D Printer

3D Printer used for Printing 3 dimensional polymer objects for a range of applications .

Facility: |

Ozone cleaner

Ozone generator used for cleaning a variety of substrates .

Facility: |


Plasma enhanced chemical vapour deposition system used for deposition of silicon dioxide and silicon nitrate thin films.

Facility: |

Plasma Asher

Plasma ashing tool used for polymer photoresist removal .

Facility: |

Polymer Glovebox

Inert atmosphere polymer glove box used for Inert atmosphere for chemical processes sensitive to oxygen and water, typically organic photovoltaics and flexible transistor fabrication .

Facility: |

Reactive Ion Etcher General

Etching/material removal used for patterning materials other than silicon .

Facility: |

Reactive Ion Etcher Silicon

Etching/material removal used for patterning silicon .

Facility: |

SU-8 Spin Coater

Spin Coater used for Photolithography, for coating of general materials particularly SU-8 type resists.

Facility: |

Thermal Evaporator

Evaporation deposition Tool used for Thermal evaporation of materials for the creation of thin films.

Facility: |

Thin film measurement systems

spectral reflectance used for optical measurement of transparent thin films .

Facility: |

UV Flood Light Source

Stand alone UV exposure system used for photolithography processes which require no high accuracy alignment.

Facility: |

Variable Angle Spectroscopic Ellipsometer

Optical characterisation using the polarisation of light used for Thin film characterisation, thickness and optical properties .

Facility: |

Wire bonders

Wire bonder used for Bonding wires of gold or aluminium .

Facility: |

Zeta Potential

electrokinetic analyzer used for investigation of electrokinetic effects .

Facility: |

Zeta sizer

Light scattering system used for Sub micron particle, molecular size and molecular weight measurements.

Facility: |


Melbourne Centre for Nanofabrication

Monash University, Clayton Campus. 151 Wellington Road, Clayton,, Victoria, Australia.

View location in Google maps. This location is based upon GPS coordinates as the street address does not accurately indicate the location of the facility.




Type: Core facility in a research organisation
Discipline areas: Biological Science, Materials Science, Nano Science
Precinct: South east
Affiliations: Deakin University, La Trobe University, Monash University, RMIT University, Swinburne University of Technology, The University of Melbourne

Biological Science categories: Clean rooms, Design and Prototyping, Devices, Lab-on-chip, Manufacturing, Microfluidic, Nanofabrication, Production