Intelligent Micro Patterning

UV Direct Write Photolithography used for Maskless Photolithography

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Post author: MCN. Last update: 20/09/2013 at 1:59 pm by MCN.

Overview

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Details

Overview

Manufacturer: Intelligent Micro Patterning , SF100 XPRESS. Installed 2012.

Patterning lines as small as 1 micron in size. Ideally suited for photomask fabrication or other standard lithography processes such as SU8 or resist patterning.

Benefits of the Intelligent Micro Patterning

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Technical features and specifications

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Tags

Capacity: This instrument is heavily booked
Operation: User or facility staff operate, User or facility staff operate pricing may vary
Access: Access pricing may vary, External researcher use available